Mechanical Sensitivity Enhancement of an Area-Changed Capacitive Accelerometer by Optimization of the Device Geometry
Badariah Bais, Burhanuddin Yeop MajlisVolume:
44
Language:
english
Pages:
9
DOI:
10.1007/s10470-005-2598-6
Date:
August, 2005
File:
PDF, 823 KB
english, 2005