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Towards a methodology for analysis of interconnect structures for 3D-integration of micro systems
Peter Schneider, Sven Reitz, Andreas Wilde, Günter Elst, Peter SchwarzVolume:
57
Language:
english
Pages:
7
DOI:
10.1007/s10470-008-9143-3
Date:
December, 2008
File:
PDF, 827 KB
english, 2008