Rapid prototyping of a Dammann grating in DMD-based maskless lithography
Zheng, Qi, Zhou, Jinyun, Chen, Qiming, Lei, Liang, Wen, Kunhua, Hu, YimingYear:
2019
Journal:
IEEE Photonics Journal
DOI:
10.1109/jphot.2019.2950281
File:
PDF, 1.39 MB
2019