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Device Structure and Passivation Options for the Integration of Scaled IGZO TFTs
Kabir, Muhammad Salahuddin, Chowdhury, Rahnuma Rifat, Manley, Robert G., Hirschman, Karl DVolume:
92
Journal:
ECS Transactions
DOI:
10.1149/09204.0143ecst
Date:
July, 2019
File:
PDF, 725 KB
2019