Active control scheme for improving mass resolution of film bulk acoustic resonators
Xue-feng He, Xing Liu, Xian-fang Yin, Zhi-yu Wen, Ke-wan ChenVolume:
32
Language:
english
Pages:
8
DOI:
10.1007/s10483-011-1454-9
Date:
June, 2011
File:
PDF, 210 KB
english, 2011