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[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY - Gaithersburg, Maryland (USA) (23-27 March 1998)] The 1998 international conference on characterization and metrology for ULSI technology - Neutron reflectometry for interfacial materials characterization
Lin, Eric K., Pochan, Darrin J., Kolb, Rainer, Wu, Wen-li, Satija, Sushil K.Year:
1998
DOI:
10.1063/1.56882
File:
PDF, 572 KB
1998