[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Real World Experience With Ion Implant Fault Detection at Freescale Semiconductor
Sing, David C., Breeden, Terry, Fakhreddine, Hassan, Gladwin, Steven, Locke, Jason, McHugh, Jim, Rendon, MichaelVolume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401566
File:
PDF, 403 KB
english, 2006