Influence of clamp-widening on the quality factor of...

Journal of Applied Physics 2019 / 10 Vol. 126; Iss. 16

Influence of clamp-widening on the quality factor of nanomechanical silicon nitride resonators

Sadeghi, Pedram, Tanzer, Manuel, Christensen, Simon L., Schmid, Silvan
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Volume:
126
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5111712
Date:
October, 2019
File:
PDF, 1.65 MB
english, 2019
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