Application of argon collisional-radiative model for inductive RF discharge research
Gizzatullin, Azamat R, Zhelonkin, Y O, Voznesencky, E F, Gizzatullin, Azat RVolume:
1328
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1328/1/012025
Date:
October, 2019
File:
PDF, 781 KB
english, 2019