Metal-Assisted Photochemical Etching of N- and Ga-Polar GaN Epitaxial Layers
Mokhov, D. V., Berezovskaya, T. N., Nikitina, E. V., Shubina, K. Yu., Mizerov, A. M., Bouravleuv, A. D.Volume:
53
Language:
english
Journal:
Semiconductors
DOI:
10.1134/s1063782619160176
Date:
December, 2019
File:
PDF, 5.46 MB
english, 2019