Integrated Carbon Cleaning and Oxide Cleaning on Si and...

ECS Transactions 2019 / 10 Vol. 93; Iss. 1

Integrated Carbon Cleaning and Oxide Cleaning on Si and SiGe in a Single Process Module

Wang, Fei, Jotheeswaran, Bubesh Babu, Tolle, John, Demos, Alex
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Volume:
93
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/09301.0017ecst
Date:
October, 2019
File:
PDF, 301 KB
english, 2019
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