ChemInform Abstract: COMPOSITION AND STRUCTURE CONTROL BY...

ChemInform Abstract: COMPOSITION AND STRUCTURE CONTROL BY SOURCE GAS RATIO IN LPCVD SILICON NITRIDE (SINX)

MAKINO, T.
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Volume:
14
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.198322029
Date:
May, 1983
File:
PDF, 120 KB
1983
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