Nickel diffusion into MoS2 and the effect of annealing on contact resistance
Walter, Timothy N., Cooley, Kayla A., Domask, Anna C., Mohney, Suzanne E.Volume:
107
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2019.104850
Date:
March, 2020
File:
PDF, 1.33 MB
2020