Application of electron channeling contrast imaging to 3D...

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Ultramicroscopy 2019 / 12

Application of electron channeling contrast imaging to 3D semiconductor structures through proper detector configurations

Han, Han, Hantschel, Thomas, Strakos, Libor, Vystavel, Tomas, Baryshnikova, Marina, Mols, Yves, Kunert, Bernardette, Langer, Robert, Vandervorst, Wilfried, Caymax, Matty
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Language:
english
Journal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2019.112928
Date:
December, 2019
File:
PDF, 917 KB
english, 2019
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