[AIP Third international stress workshop on stress-induced phenomena in metallization - Palo Alto, California (USA) (21-23 Jun 1995)] AIP Conference Proceedings - Cu behaviors induced by aging and their effects on electromigration resistance on Al-Cu lines
Nogami, Takeshi, Nemoto, TakenaoVolume:
373
Year:
1996
Language:
english
DOI:
10.1063/1.50928
File:
PDF, 1.13 MB
english, 1996