Influence of Showerhead–Sample Distance (GAP) in MOVPE Close Coupled Showerhead Reactor on GaN Growth
Czernecki, Robert, Moszak, Karolina, Olszewski, Wojciech, Grzanka, Ewa, Leszczynski, MikeVolume:
12
Journal:
Materials
DOI:
10.3390/ma12203375
Date:
October, 2019
File:
PDF, 1.64 MB
2019