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Applied Surface Science 2019 / 11

Molecular dynamics simulation of abrasive characteristics and interfaces in chemical mechanical polishing

Nguyen, Van-Thuc, Fang, Te-Hua
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Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.144676
Date:
November, 2019
File:
PDF, 2.62 MB
2019
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