Study on new method and mechanism of microcutting-etching...

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Journal of Materials Processing Technology 2019 / 11

Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching

Zhou, Tianfeng, Xu, Ruzhen, Ruan, Benshuai, He, Yupeng, Liang, Zhiqiang, Wang, Xibin
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Journal:
Journal of Materials Processing Technology
DOI:
10.1016/j.jmatprotec.2019.116510
Date:
November, 2019
File:
PDF, 4.55 MB
2019
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