Nanowire & Nanosheet FETs for Ultra-Scaled, High-Density Logic and Memory Applications
Veloso, A., Huynh-Bao, T., Matagne, P., Jang, D., Eneman, G., Horiguchi, N., Ryckaert, J.Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2019.107736
Date:
November, 2019
File:
PDF, 978 KB
2019