Low-temperature plasma annealing of sputtered indium tin...

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Thin Solid Films 2019 / 11

Low-temperature plasma annealing of sputtered indium tin oxide for transparent and conductive thin-films on glass and polymer substrates

Klein, Eric, Huber, Kilian, Paul, Oliver, Ruther, Patrick
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Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.137715
Date:
November, 2019
File:
PDF, 931 KB
2019
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