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Predicting strength distributions of MEMS structures using flaw size and spatial density
Cook, Robert F., DelRio, Frank W., Boyce, Brad L.Volume:
5
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/s41378-019-0093-y
Date:
December, 2019
File:
PDF, 2.35 MB
2019