![](/img/cover-not-exists.png)
[IEEE ESSDERC 2019 - 49th European Solid-State Device Research Conference (ESSDERC) - Cracow, Poland (2019.9.23-2019.9.26)] ESSDERC 2019 - 49th European Solid-State Device Research Conference (ESSDERC) - Back-end-of-line CMOS-compatible diode fabrication with pure boron deposition down to 50 °C
Knezevic, Tihomir, Suligoj, Tomislav, Liu, Xingyu, Nanver, Lis K., Elsayed, Ahmed, Dick, Jan F., Schulze, JoergYear:
2019
DOI:
10.1109/ESSDERC.2019.8901810
File:
PDF, 1.70 MB
2019