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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Sb Implantation at High Dose and Medium Energy in SAion
Kawasaki, Yoji, Kawaguchi, Hiroshi, Yagita, Takanori, Suetsugu, Noriyuki, Kabasawa, MitsuakiYear:
2018
DOI:
10.1109/iit.2018.8807911
File:
PDF, 578 KB
2018