ChemInform Abstract: MASS SPECTRA ANALYSES OF IMPURITIES AND ION CLUSTERS IN AMORPHOUS AND CRYSTALLINE SILICON FILMS
FLEDMAN, CHARLES, SATKIEWICZ, FRANK G.Volume:
4
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.197343478
Date:
October, 1973
File:
PDF, 86 KB
1973