The Decomposition Pathways of SF6 in the Presence of...

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Plasma Chemistry and Plasma Processing 2019 / 12

The Decomposition Pathways of SF6 in the Presence of Organic Insulator Vapors

Fu, Yuwei, Wang, Xiaohua, Wang, Xinxin, Yang, Aijun, Rong, Mingzhe
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Journal:
Plasma Chemistry and Plasma Processing
DOI:
10.1007/s11090-019-10055-0
Date:
December, 2019
File:
PDF, 2.90 MB
2019
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