Imaging low-dimensional nanostructures by very low voltage...

Scientific Reports 2019 / 12 Vol. 9; Iss. 1

Imaging low-dimensional nanostructures by very low voltage scanning electron microscopy: ultra-shallow topography and depth-tunable material contrast

Zarraoa, Laura, González, María U., Paulo, Álvaro San
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Volume:
9
Journal:
Scientific Reports
DOI:
10.1038/s41598-019-52690-9
Date:
December, 2019
File:
PDF, 2.10 MB
2019
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