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[IEEE 2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Kanazawa, Japan (2019.5.21-2019.5.25)] 2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Plasma-activated direct bonding of coated optical glasses
Birckigt, P., Rothhardt, C., Grabowski, K., Jorke, K., Schlegel, R., Dreisow, F., Kalkowski, G., Risse, S., Eberhardt, R.Year:
2019
DOI:
10.23919/ltb-3d.2019.8735181
File:
PDF, 209 KB
2019