ChemInform Abstract: EIGENSCHAFTEN VON SILICIUMNITRIDFILMEN

VOROB'EV, G. A., DANILINA, T. I., KRIVOSHCHEKOV, V. P., SMIRNOVA, K. I., SHANDRA, Z. A.

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Volume:

Journal:

Chemischer Informationsdienst

DOI:

10.1002/chin.197505038

Date:

February, 1975

File:

PDF, 114 KB

1975

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