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ChemInform Abstract: EIGENSCHAFTEN VON SILICIUMNITRIDFILMEN
VOROB'EV, G. A., DANILINA, T. I., KRIVOSHCHEKOV, V. P., SMIRNOVA, K. I., SHANDRA, Z. A.Volume:
6
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.197505038
Date:
February, 1975
File:
PDF, 114 KB
1975