(Invited) Challenges of Graphene Process...

(Invited) Challenges of Graphene Process Integration in CMOS Technology

Lisker, Marco, Lukosius, Mindaugas, Lukose, Rasuole, Wenger, Christian, Mai, Andreas
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Volume:
92
Journal:
ECS Transactions
DOI:
10.1149/09204.0201ecst
Date:
July, 2019
File:
PDF, 464 KB
2019
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