UV degradability of polysilanes for nanoresists examined by...

Czechoslovak Journal of Physics 2006 Vol. 56; Iss. 1

UV degradability of polysilanes for nanoresists examined by electron spectroscopies and photoluminescence

I. Kuritka, F. Schauer, P. Saha, J. Zemek, P. Jiricek, S. Nespurek
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Volume:
56
Year:
2006
Language:
english
Pages:
10
DOI:
10.1007/s10582-006-0064-z
File:
PDF, 193 KB
english, 2006
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