PECVD silicon carbide deposited at different temperature
J. Huran, B. Zaťko, I. Hotový, J. Pezoldt, A. P. Kobzev, N. I. BalalykinVolume:
56
Language:
english
Pages:
1
DOI:
10.1007/s10582-006-0351-8
Date:
October, 2006
File:
PDF, 298 KB
english, 2006