Microwave PECVD of nanocrystalline diamond with rf induced...

Czechoslovak Journal of Physics 2006 / 10 Vol. 56; Iss. 2 Suppleme

Microwave PECVD of nanocrystalline diamond with rf induced bias nucleation

Z. Frgala, O. Jašek, M. Karásková, L. Zajíčková, V. Buršíková, D. Franta, J. Matějková, A. Rek, P. Klapetek, J. Buršík
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Volume:
56
Language:
english
Pages:
1
DOI:
10.1007/s10582-006-0353-6
Date:
October, 2006
File:
PDF, 1.93 MB
english, 2006
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