A kinetic simulation of the effect of frequency on the power dissipation in VHF SiH4/H2discharges
M. Yan, W. J. GoedheerVolume:
48
Year:
1998
Language:
english
Pages:
6
DOI:
10.1007/s10582-998-0051-7
File:
PDF, 329 KB
english, 1998