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Double intermediate bonding layers for the fabrication of high-quality SOI-based exfoliated Ge film with excellent high-temperature characteristics
Ke, Shaoying, Zhou, Jinrong, Wang, Ziwei, Huang, Donglin, Wang, Yuxiang, Peng, Qiang, Li, Cheng, Chen, SongyanJournal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/ab5dcd
Date:
December, 2019
File:
PDF, 539 KB
2019