The Research about Preparation of High Purity...

IOP Conference Series Materials Science and Engineering 2017 / 12 Vol. 274

The Research about Preparation of High Purity Hexachlorodisilane

Wan, Ye, Zhao, Xiong, Yan, Dazhou, Zhao, Yu, Guo, Shuhu, Wang, Lei, Yang, Dian
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Volume:
274
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/274/1/012125
Date:
December, 2017
File:
PDF, 181 KB
2017
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