Reliability Enhancement of Copper/Porous SiOCH...

Reliability Enhancement of Copper/Porous SiOCH Metallization Systems Using Nitrogen Stuffing and Bias-Filter Sputter Deposited Mn 2 O 3 Barrier

Fang, Jau-Shiung, Yu, Kuang-Yu, Chen, Sung-Te, Cheng, Yi-Lung, Wang, Yi-Sheng, Chen, Giin-Shan
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
8
Year:
2019
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0011912jss
File:
PDF, 752 KB
2019
Conversion to is in progress
Conversion to is failed