![](/img/cover-not-exists.png)
Minimax Optimization for Recipe Management in High-Mixed Semiconductor Lithography Process
Khakifirooz, Marzieh, Chien, Chen-Fu, Fathi, Mahdi, Pardalos, Panos M.Year:
2019
Journal:
IEEE Transactions on Industrial Informatics
DOI:
10.1109/TII.2019.2957145
File:
PDF, 807 KB
2019