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Hybrid Passivation for Foldable Indium Gallium Zinc Oxide Thin‐Film Transistors Mediated by Low‐Temperature and Low‐Damage Parylene‐C/Atomic Layer Deposition‐AlO x Coating
Zhan, Shijie, Han, Soodeok, Bang, Sang Yun, Li, Benxuan, Chun, Young Tea, Hou, Bo, Kim, Jong MinJournal:
physica status solidi (a)
DOI:
10.1002/pssa.201900832
Date:
December, 2019
File:
PDF, 1.17 MB
2019