Development of a fast atom beam gun for surface-activated...

Precision Engineering 2020 / 03 Vol. 62

Development of a fast atom beam gun for surface-activated bonding

Morisaki, Ryo, Hirai, Yuuki, Oka, Chiemi, Mizoshiri, Mizue, Yamazaki, Takahiro, Sakurai, Junpei, Hirai, Takami, Takahashi, Tomonori, Tsuji, Hiroyuki, Hata, Seiichi
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Volume:
62
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2019.11.006
Date:
March, 2020
File:
PDF, 2.00 MB
2020
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