Silicon Carbide Films Prepared by Silicon Nitride...

Silicon Carbide Films Prepared by Silicon Nitride Evaporation

Liang, Xin, Chen, Changlian, Zhou, Shicong, Xu, Man, Ji, Jiayou, Huang, Zhiliang, Ding, Gangqiang, Zhang, Hongliang
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Volume:
678
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/678/1/012162
Date:
November, 2019
File:
PDF, 292 KB
2019
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