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Silicon Carbide Films Prepared by Silicon Nitride Evaporation
Liang, Xin, Chen, Changlian, Zhou, Shicong, Xu, Man, Ji, Jiayou, Huang, Zhiliang, Ding, Gangqiang, Zhang, HongliangVolume:
678
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/678/1/012162
Date:
November, 2019
File:
PDF, 292 KB
2019