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Designing resonance microwave cavities to optimize plasma generation
Megia-Macias, Ana, Barrios-Diaz, Elena, Jauberteau, Jean-Louis, Jauberteau, Isabelle, Cortazar, Osvaldo DanielYear:
2019
Journal:
IEEE Transactions on Instrumentation and Measurement
DOI:
10.1109/TIM.2019.2957891
File:
PDF, 5.98 MB
2019