Multiple replication of hierarchical structures from...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2019 / 11 Vol. 37; Iss. 6

Multiple replication of hierarchical structures from polymer masters with anisotropy

Mayer, Andre, Rond, Johannes, Staabs, Johannes, Leifels, Miriam, Zajadacz, Joachim, Ehrhardt, Martin, Lorenz, Pierre, Sunagawa, Hiroki, Hirai, Yoshihiko, Zimmer, Klaus, Scheer, Hella-Christin
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Volume:
37
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5120881
Date:
November, 2019
File:
PDF, 3.39 MB
2019
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