Very low-temperature growth of silicon thin films using chlorinated precursors and optical properties
Linares, Javitt, López-Suárez, A., Ramos, C., Picquart, M., García-Sánchez, M.F., Dutt, A., Santana, G.Volume:
108
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2019.104859
Date:
March, 2020
File:
PDF, 1.55 MB
2020