Aging Effects of KOH+NH 2 OH...

ECS Journal of Solid State Science and Technology 2019 Vol. 8; Iss. 11

Aging Effects of KOH+NH 2 OH Solution on the Etching Characteristics of Silicon

Rao, Avvaru Venkata Narasimha, Pal, Prem, Pandey, Ashok Kumar, Swarnalatha, Veerla, Menon, P. Krishna, Tanaka, Hiroshi, Sato, Kazuo
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Volume:
8
Year:
2019
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0081911jss
File:
PDF, 1.79 MB
2019
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