Influence of PECVD deposition temperature on phosphorus...

Solar Energy Materials and Solar Cells 2020 / 03 Vol. 206

Influence of PECVD deposition temperature on phosphorus doped poly-silicon passivating contacts

Chen, Wenhao, Truong, Thien N., Nguyen, Hieu T., Samundsett, Christian, Phang, Sieu Pheng, MacDonald, Daniel, Cuevas, Andres, Zhou, Lang, Wan, Yimao, Yan, Di
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Volume:
206
Journal:
Solar Energy Materials and Solar Cells
DOI:
10.1016/j.solmat.2019.110348
Date:
March, 2020
File:
PDF, 1.64 MB
2020
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