Compact water-cooled surface wave plasma source for remote...

Compact water-cooled surface wave plasma source for remote plasma cleaning

You, Hyun Jong, Girka, Oleksii
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Volume:
90
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5126161
Date:
December, 2019
File:
PDF, 3.96 MB
2019
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