Influence of Si doping and O 2...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2019 / 12 Vol. 37; Iss. 6

Influence of Si doping and O 2 flow on arc-deposited (Al,Cr) 2 O 3 coatings

Landälv, Ludvig, Göthelid, Emmanuelle, Jensen, Jens, Greczynski, Grzegorz, Lu, Jun, Ahlgren, Mats, Hultman, Lars, Alling, Björn, Eklund, Per
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Volume:
37
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5118312
Date:
December, 2019
File:
PDF, 4.78 MB
2019
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