Effect of HgCdTe native oxide on electro-physical...

Effect of HgCdTe native oxide on electro-physical properties of MIS structures with ALD Al2O3

Zakirov, Evgeny, Kesler, V G, Sidorov, Georgiy, Kovchavtsev, Anatoly Petrovich
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Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/ab6105
Date:
December, 2019
File:
PDF, 854 KB
2019
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