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Development of Primary Calibration System for Vibration and Acceleration Standard in High Frequency Range with Laser Interferometer with Multifold Optical Path
Oota, Akihiro, Usuda, Takashi, Aoyama, Hisayuki, Sato, SojunVolume:
126
Year:
2006
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.126.612
File:
PDF, 1.53 MB
2006