Effects of in-situ SiNx interlayer on structural and...

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Japanese Journal of Applied Physics 2019 / 12

Effects of in-situ SiNx interlayer on structural and optical properties for nonpolar a-plane GaN epilayers

Zhao, Jianguo, Zhang, Xiong, Fan, Aijie, Chen, Shuai, He, Jiaqi, Pan, Jiangyong, Chen, Daihua, Tian, Ming, Feng, Zhe Chuan, Chang, Jianhua, Liu, Qingquan, Ge, Junxiang
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Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab6004
Date:
December, 2019
File:
PDF, 779 KB
2019
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